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表面氧污染影响钛膜吸氢量的机理
引用本文:张强基,张勇,丁力,赵鹏骥,翟国良,牟方明.表面氧污染影响钛膜吸氢量的机理[J].真空科学与技术学报,1995(6).
作者姓名:张强基  张勇  丁力  赵鹏骥  翟国良  牟方明
作者单位:复旦大学真空物理实验室!上海200433(张强基,张勇,丁力),中国工程物理研究院核物理与化学研究所!成都610003(赵鹏骥,翟国良,牟方明)
基金项目:中国工程物理研究院基金
摘    要:表面氧污染的钛膜,其吸氢能力比清洁钛膜降低达数倍之多。在厚度d为40nm,表面氧污染的钛膜表面上,重新蒸镀一层极薄的(约1.2nm)清洁钛膜,吸氢、释氢的测量表明其吸氢能力得到恢复。另外,还对其他四块不同厚度的钛膜,在表面清洁及氧污染的条件下,分别进行了吸氢能力实验。实验结果证实:氧污染降低钛膜吸氢能力的原因是使钛膜上氢分子解离的位置减少,而不是扩散阻挡层的作用。

关 键 词:钛膜  氧污染  吸氢能力  扩散阻挡层

THE EFFECT OF OXYGEN CONTAMINATION ON ABSORPTION FOR H_2/Ti
Zhang Qiangji,Zhang Yong,Ding Li.THE EFFECT OF OXYGEN CONTAMINATION ON ABSORPTION FOR H_2/Ti[J].JOurnal of Vacuum Science and Technology,1995(6).
Authors:Zhang Qiangji  Zhang Yong  Ding Li
Abstract:Small amounts of Ti(~1. 2 nm) were coated on top of Ti thin film with thickness of 40 nm which was contaminated by oxygen. It can result in a recovery of the absorption capability of H2. Four Ti films with different thicknesses were prepared for hydrogen absorption and desorption experiment under clean and contaminated surface conditions. The results show that the oxygen contamination decreases the number of the dissociative sites for hydrogen and then reduces the hydrogen adsorption ability.
Keywords:Ti film  Oxygen contamination  Capability of hydrogen absorption  Diffusion barrier  
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