| 同步辐射储存环用国产溅射离子泵的发展方向 |
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| 引用本文： | 蒋迪奎,殷立新,赵飞云.同步辐射储存环用国产溅射离子泵的发展方向[J].真空科学与技术学报,1999,19(4). |
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| 作者姓名： | 蒋迪奎 殷立新 赵飞云 |
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| 作者单位： | 中国科学技术大学国家同步辐射实验室!合肥230029 |
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| 摘 要： | 根据真空系统运行条件，参考国内外ＳＩＰ，拟订了同步辐射储存环用国产ＳＩＰ的性能指标。结合ＳＩＰ的机理和国际测试标准，对指标作了分析说明，以期加深国内真空泵厂对改进ＳＩＰ必要性的认识，统一厂方和用户对指标的理解，在真空界推行公正的竞争，促进国产ＳＩＰ质量的提高和走向国际市场。
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| 关 键 词： | 溅射离子泵 性能指标 说明 |
Development Direction of SIP Made in China for Storage Ring |
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| Jiang Dikui,Yin Lixin,Zhao Feiyun.Development Direction of SIP Made in China for Storage Ring[J].JOurnal of Vacuum Science and Technology,1999,19(4). |
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| Authors: | Jiang Dikui Yin Lixin Zhao Feiyun |
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| Abstract: | The performance parameters of SIP made in China for SR storage ring are made according the practical operation conditions of the vacuum system. The parameters are explained combined the mechanism of SIP with the international measurement standard for SIP.Deepening the vacuum factory's realizations for the parameters of SIP and for the necessity of modifying SIP, introducing the open and fair competitions in the vacuum field in China, improving the qualities of SIP made in China and prompting their export are our purposes. |
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| Keywords: | Sputtering ion pump Performance parameter Explanation |
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