| Cr在多弧离子镀(Ti, Cr)N复合膜中的作用 |
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| 引用本文： | 张鑫,邱万奇,史新伟,李春明.Cr在多弧离子镀(Ti, Cr)N复合膜中的作用[J].真空,2007,44(2):48-50. |
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| 作者姓名： | 张鑫 邱万奇 史新伟 李春明 |
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| 作者单位： | 华南理工大学机械工程学院,广东,广州,510640 |
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| 摘 要： | 利用AIP-01多弧离子镀膜机,通过改变铬靶电流,在高速钢基体上沉积出不同Cr含量的(Ti,Cr)N复合膜涂层,用扫描电子显微镜、微纳米力学测试仪和X射线对薄膜的表面颗粒、硬度及内应力进行了分析.结果表明薄膜中添加Cr能减小表面颗粒尺寸,提高硬度,当Cr的含量达到31%(wt%)时,薄膜硬度达到最高值,此时薄膜的内应力也最大.
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| 关 键 词： | 电弧离子镀 |
| 文章编号： | 1002-0322(2007)02-0048-03 |
| 修稿时间： | 2006年8月2日 |
Effect of Cr element on properties of (Ti,Cr)N composite films prepared by multi-arc ion coating |
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| ZHANG Xin,QIU Wan-qi,SHI Xin-wei,LI Chun-ming.Effect of Cr element on properties of (Ti,Cr)N composite films prepared by multi-arc ion coating[J].Vacuum,2007,44(2):48-50. |
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| Authors: | ZHANG Xin QIU Wan-qi SHI Xin-wei LI Chun-ming |
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| Affiliation: | College of mechanical engineering, South China university of technology, Guangzhou 510640, China |
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| Abstract: | The (Ti,Cr)N films which has different content of Cr were deposited on high-speed steel substrate by changing current of Cr target on AIP-01 coater. The surface morphology, hardness and internal stress of (Ti,Cr)N films were analysed by using SEM, micro-nano indentation testing and X ray diffraction. The results showed that the hardness of (Ti,Cr)N films increases with increasing content of Cr. When the content of Cr is 31%(wt%), the hardness and innernal stress of films both reach the maximum. The micro-droplet size on (Ti,Cr)N film surface is smaller than that of TiN. |
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| Keywords: | Cr TiN |
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