| 金刚石薄膜制备和评价 |
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| 引用本文： | 邱万奇,刘正义,陈剑惠,刘志唐,周克崧,代明江,王德政,丁谦.金刚石薄膜制备和评价[J].理化检验(物理分册),1998,34(6):14-16,36. |
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| 作者姓名： | 邱万奇 刘正义 陈剑惠 刘志唐 周克崧 代明江 王德政 丁谦 |
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| 作者单位： | 华南理工大学 广州510641(邱万奇，刘正义，陈剑惠，刘志唐)，广州有色金属研究院 广州510651(周克崧，代明江，王德政，丁谦) |
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| 基金项目： | 广东省自然科学基金 B6-102-234 |
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| 摘 要： | 采用平直钨丝作热解源,并借助钨丝支架的弹性恢复力,较好地解决了热丝热解化学气相沉积法(HFCVD)合成金刚石过程中热解丝的变形问题.样品独立加热,基片温度、钨丝温度、钨丝与样品基片距离均可独立调节.装置改进后,在Si(100)上合成了面积大约45mm×25mm的比较均匀的金刚石膜.用扫描电子显微镜(SEM)、Raman光谱和X射线衍射仪对制备的金刚石膜进行了分析.
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| 关 键 词： | 金刚石薄膜 合成 热丝 HFCVD 薄膜制备 |
SYNTHESIS AND EVALUATION OF HIGH-PERFORMANCE DIAMOND FILMS |
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| Qiu Wanqi,Liu Zhengyi,Chen Jianhui,Liu ZhitangSouth China University of TechnologyZhou Kesong,Dai Mingjiang,Wang Dezheng,Ding QianGuangzhou Research Institute of Non-ferrous Metals.SYNTHESIS AND EVALUATION OF HIGH-PERFORMANCE DIAMOND FILMS[J].Physical Testing and Chemical Analysis Part A:Physical Testing,1998,34(6):14-16,36. |
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| Authors: | Qiu Wanqi Liu Zhengyi Chen Jianhui Liu ZhitangSouth China University of TechnologyZhou Kesong Dai Mingjiang Wang Dezheng Ding QianGuangzhou Research Institute of Non-ferrous Metals |
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| Affiliation: | Qiu Wanqi Liu Zhengyi Chen Jianhui Liu ZhitangSouth China University of TechnologyZhou Kesong Dai Mingjiang Wang Dezheng Ding QianGuangzhou Research Institute of Non-ferrous Metals |
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| Abstract: | |
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| Keywords: | Diamond Big area Hot-filament |
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