| 改性金刚石膜的形貌、结构和附着性能 |
| |
| 引用本文： | 黄元盛,邱万奇,罗承萍,黄彩娥.改性金刚石膜的形貌、结构和附着性能[J].材料科学与工艺,2006,14(1):109-112. |
| |
| 作者姓名： | 黄元盛 邱万奇 罗承萍 黄彩娥 |
| |
| 作者单位： | 1. 韶关学院,机电系,广东,韶关,512005
2. 华南理工大学,机械工程学院,广东,广州,510640 |
| |
| 基金项目： | 高等学校博士学科点专项科研项目
,
广东省博士启动基金
,
广东省博士启动基金 |
| |
| 摘 要： | 为了提高金刚石膜/基附着力,通过氧辅助使高温钨丝蒸发,在基底表面与碳氢基团反应生成纳米碳化钨,从而得到金刚石和纳米碳化钨混合的改性金刚石膜.用扫描电子显微镜、X射线衍射仪和压痕法研究了改性金刚石膜的形貌、结构和附着力性能.结果表明,碳钨化合物以纳米相存在于改性金刚石膜中.碳钨化合物的存在使改性金刚石膜的硬度下降,但是适当的碳钨化合物能使膜/基附着力性能得到较大提高.当氧气通入量为1.2sccm时,膜/基附着力性能最好.
|
| 关 键 词： | 改性金剐石膜 化学气相沉积 碳钨化合物 附着力性能 氧气 |
| 文章编号： | 1005-0299(2006)01-0109-04 |
| 收稿时间： | 2004-03-12 |
| 修稿时间： | 2004年3月12日 |
Morphology, structure and adhesion of modified diamond films |
| |
| HUANG Yuan-sheng,QIU Wan-qi,LUO Cheng-ping,HUANG Cai-e.Morphology, structure and adhesion of modified diamond films[J].Materials Science and Technology,2006,14(1):109-112. |
| |
| Authors: | HUANG Yuan-sheng QIU Wan-qi LUO Cheng-ping HUANG Cai-e |
| |
| Affiliation: | 1. Dept. of Mechano-Electronics, Shaoguan University, Shaoguan 512005, China; 2. School of Mechanical Engineering, South China University of Technology, Guangzhou 510640, China |
| |
| Abstract: | In order to improve the adhesion of diamond films, Tungsten was evaporated and reacted with methane to form tungsten carbide which mixed with diamond. The diamond with tungsten carbide was call modified diamond film. The morphology, structure and adhesion of the modified diamond films were investigated with scanning electronic microscope, X -ray diffractometer and indention. The results show that tungsten carbide in the modified diamond films is nanophase. The adhesion of the modified diamond films is better than that of the diamond without tungsten carbide although tungsten carbide reduces the hardness of the modified diamond films. The adhesion is best when the flux of oxygen is 1.2 sccm. |
| |
| Keywords: | Modified diamond film chemical vapor deposition(CVD) tungsten carbide adhesion oxygen |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
|
