| 一种检测平晶和透镜面形的方法 |
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| 引用本文： | 范冰清,宋增超,张丰.一种检测平晶和透镜面形的方法[J].上海计量测试,2014(3):23-25. |
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| 作者姓名： | 范冰清 宋增超 张丰 |
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| 作者单位： | 上海市计量测试技术研究院 |
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| 摘 要： | 介绍了数字式激光平面干涉仪的测量优势,阐述了利用其进行平面和球面面形的测量方法,弥补了传统平面等厚干涉仪只能测量平面平晶的不足。同时分析了影响测量结果的几个因素,并利用ZEMAX软件模拟平晶位置,观察干涉条纹。
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| 关 键 词： | 干涉仪 平面检测 球面检测 干涉条纹 |
A method of testing the surface of the flat plane and the lens |
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| Fan Bingqing,Song Zengchao,Zhang Feng.A method of testing the surface of the flat plane and the lens[J].Shanghai Meassurement and Testing,2014(3):23-25. |
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| Authors: | Fan Bingqing Song Zengchao Zhang Feng |
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| Affiliation: | (Shanghai Institute of Measurement and Testing Technology) |
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| Abstract: | The advantage of measurement using digital laser interferometer is introduced in the paper. The measurement method of the flat plane and the lens is explained, which makes up the deficiency of using the traditional flat equal thickness interferometer. Meanwhile it is analyzed several factors which may affect the measurement result. Simulating the standard optical flat by zemax, we can observe the change of the interference fringe. |
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| Keywords: | interferometer flat plan test lens test interference fringe |
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