| 共平面低功耗CO气体传感器的设计及制作 |
| |
| 引用本文： | 刘丽,张彤,王连元,田云霞,范会涛.共平面低功耗CO气体传感器的设计及制作[J].功能材料与器件学报,2009,15(6). |
| |
| 作者姓名： | 刘丽 张彤 王连元 田云霞 范会涛 |
| |
| 作者单位： | 1. 吉林大学物理学院,长春130061;吉林大学超硬材料国家重点实验室,长春130012
2. 吉林大学电子科学与工程学院,长春,130012 |
| |
| 基金项目： | 吉林省科技厅资助项目，低维材料及其应用技术教育部重点实验室开放课题 |
| |
| 摘 要： | 设计了一种新型的共平面微结构气体传感器,利用MEMS技术制作了传感器样品.实验测得该传感器对于体积分数为50×10~(-6)CO气体的灵敏度为8.6(R0/R),功耗为82mW,响应时间约5s,恢复时间约22s,该传感器的灵敏度是同种敏感材料烧结型传感器(测体积分数50×10~(-6) CO气体)的2.5倍,而功耗却是同种敏感材料烧结型传感器的1/2,是一种具备了体积小、重量轻、功耗低、灵敏度高、便于与其它器件集成等特点,而且制作工艺简单,成本较低的微结构CO气体传感器.
|
| 关 键 词： | 低功耗 微结构 气体传感器 |
Design and fabrication of planar structure carbon monoxide gas sensor with low power consumption |
| |
| LIU Li,ZHANG Tong,WANG Lian-yuan,TIAN Yun-xia,FAN Hui-tao.Design and fabrication of planar structure carbon monoxide gas sensor with low power consumption[J].Journal of Functional Materials and Devices,2009,15(6). |
| |
| Authors: | LIU Li ZHANG Tong WANG Lian-yuan TIAN Yun-xia FAN Hui-tao |
| |
| Affiliation: | LIU Li1,3,ZHANG Tong2,WANG Lian-yuan1,TIAN Yun-xia1,FAN Hui-tao2(1.College of Physics,Jilin University Changchun 130026,China,2.College of Electronic Science and Engineering,Jilin University Changchun 130012,3.State Key laboratory of Superhard Materials Jilin University,Changchun 130012,China) |
| |
| Abstract: | A novel micro-structure co-plane gas sensor was designed.And a sample of sensor was fabricated by MEMS technology.The tests show the sensitivity was 8.6 for 50×10~(-6) CO gas concentration,the power consumption is 82mW,response time is about 5 s,and recuperate time is more or less 22s.Whereas for the conventionality sintered type sensor made by the same sensitive materials,the sensitivity of new type sensor is 2.5 times higher than the conventionality type sensor,and the power consumption is just the half.The new type of micro-structure CO gas sensor possess the advantages of small volume,lightness,low power consumption,high sensitivity,and convenience for assembling. |
| |
| Keywords: | CO low power consumption micro-structure CO gas sensor |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
|
