| Intelligent System for Mask Phase-Shifter Design |
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| 作者姓名： | 杨代明 冯伯儒 侯德胜 张锦 周崇喜 |
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| 作者单位： | 中国科学院光电技术研究所微细加工光学技术国家重点实验室 |
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| 摘 要： | 讨论了一个用于相移掩模智能设计的专家系统。这个系统包括输入输出系统，仿真系统，知识库系统，人—机接口，黑板系统。它有一个包括图形获取、预处理、模式抽取、搜索与解释、图形复合与输出等环节的工作过程。系统的软件实现运用了面向对象的表示方法。
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| 关 键 词： | 相移掩模，专家系统，智能系统 |
Intelligent System for Mask Phase Shifter Design |
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| Yang Daiming,Feng Boru,Hou Desheng Zhang Jin,Zhou Chongxi.Intelligent System for Mask Phase-Shifter Design[J].Opto-Electronic Engineering,1997(Z1). |
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| Authors: | Yang Daiming Feng Boru Hou Desheng Zhang Jin Zhou Chongxi |
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| Abstract: | An expert system which is designed for the phase shifting mask(PSM) design is discussed. The expert system includes the input output system, the simulation system, the knowledge base system, the man machine interface, the blackboard system. It has an operating process which includes graph acquiring, preprocessing, pattern extracting, searching and explaining, graph combining and output. An object oriented representational method has been used for the realization of the software. |
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| Keywords: | Phase shifting mask Expert system Intelligent system |
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