应力抛光技术加工抛物面的实验研究

大口径非球面加工技术一直是先进光学制造领域研究的前沿课题,本文开展了以大型非球面应力抛光技术(SMP)为核心的相关先进光学制造技术的研究.研究了应力抛光技术的原理及算法,以加工一块口径为φ314mm,F/7的抛物面镜为例,验证应力抛光技术的合理性和有效性.采用干涉仪检测抛光结束的抛物面其峰值(PV)为3.317λ,均方根(rms)为0.489λ.结果表明,应力抛光技术能够以较高精度、快速地形成旋转对称的抛物面,其面形误差满足或接近于非球面面形的精度要求.

Experimental Investigation of Stressed Mirror Polishing on Paraboloid

Fabrication of large aspheric mirror continues to be a challenge in the research field about advanced optical manufacture.Some advanced optics manufacturing research,which focused on large aspberic mirror manufactured by Stressed Mirror Polishing (SMP),is developed.SMP based on mechanics of elasticity is a novel aspheric fabrication technology that could transform aspheric optical fabrication technology into sphere optical fabrication technology,which greatly improve the fabrication efficiency.Take fabricating a paraboloid mirror of φ314 mm diameter and F/7 for example to analyze the optical fabrication technology progress of paraboloid in stressed-state.Rationality and effectiveness of SMP were investigated.Establishing measurement system of sphere and paraboloid to analyze the experiment result and adopting interferometer to get surface shape of finished paraboloid,PV=3.317λ,rms=0.489λ The results indicate that the method of the SMP can be used to produce the revolution axisymmetric paraboloid mirrors with high precision and efficiency.