以环形子孔径扫描法测量大口径非球面的研究

总结非球面常用检验方法在应用中优、缺点的基础上,使用环形子孔径扫描法来测量大口径非球面。这种方法使被测元件相对于参考波前的斜率差减小到干涉仪允许的测量范围内,每次测量仅是被测表面的一部分,通过算法实现数据“拼接”,从而得到整个面形信息。该方法无需辅助光学元件即可实现对大口径、大相对口径非球面的直接测量,为大口径高精度非球面的加工检验提供了有效手段。

Study on the measurement of large-aperture aspheric surfaces with annular sub-aperture scanning method

On the basis of summing up conventional testing methods for aspheric surfaces , annular sub-aperture scanning method is applied to measurement of large-aperture aspheric surfaces. This method makes the slope difference of the measured element relative to reference wavefront to be reduced to a permissible measuring range of the interferometer. Each measurement area is only a part of the surface to be measured . The whole plane information can be obtained through data splicing. The method can perform direct measurement of large-aperture and large relative aperture aspheric surfaces without additional optical elements, thus providing an effective means for testing and processing large-aperture high-precision aspheric surfaces.