| 半导体基片表面微小高温区域的红外测温系统 |
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| 引用本文： | 吴云峰,叶玉堂,焦世龙,杨先明,秦宇伟,范超.半导体基片表面微小高温区域的红外测温系统[J].光电工程,2003,30(6):32-35,42. |
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| 作者姓名： | 吴云峰 叶玉堂 焦世龙 杨先明 秦宇伟 范超 |
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| 作者单位： | 电子科技大学光电信息学院,四川,成都,610054 |
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| 基金项目： | 国家自然科学基金资助项目(60277008)，中国电子科技集团电子科学研究院及四川省科技厅资助项目 |
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| 摘 要： | 利用红外辐射测温原理，设计成半导体基片上激光焦斑温度不接触测量系统。该系统由透镜成像系统、探测器、精密电动平台及相关电路和软件组成，其测温范围大，温度分辨力可达0．2K，还可得到温度-时间关系曲线；可自动测量热斑的温度分布及寻找热斑的最高温度区域；测量区域的最小直径为18μm。
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| 关 键 词： | 红外测温系统 激光焦斑 自动测量 |
| 文章编号： | 1003-501X(2003)06-0032-04 |
| 收稿时间： | 2003/2/25 |
An infrared temperature-measuring system for a small high-temperature region on semiconductor substrate |
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| WU Yun-feng,YE Yu-tang,JIAO Shi-long,YANG Xian-ming,QIN Yu-wei,FAN Chao.An infrared temperature-measuring system for a small high-temperature region on semiconductor substrate[J].Opto-Electronic Engineering,2003,30(6):32-35,42. |
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| Authors: | WU Yun-feng YE Yu-tang JIAO Shi-long YANG Xian-ming QIN Yu-wei FAN Chao |
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| Abstract: | With IR temperature-measuring principle, a non-contact measuring system for measuring laser spot temperature on semiconductor substrate is designed. The system consists of lens imaging system, detector, precision electric platform and the related circuit and software. Its temperature-measuring range is large, the resolving power for temperature can be as high as 0.2K and temperature-time relation curve can be also obtained. The system can automatically measure temperature distribution of thermal spots and looks for the maximum temperature region of a thermal spot. The minimum diameter of the measuring region is 18 micron. |
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| Keywords: | Infrared temperature measurement system Laser spot Automatic measurement |
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