| 快速反射镜系统用光栅测微仪 |
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| 引用本文： | 韩旭东,徐新行,王兵,王恒坤,刘长顺.快速反射镜系统用光栅测微仪[J].光电工程,2011(10):115-119. |
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| 作者姓名： | 韩旭东 徐新行 王兵 王恒坤 刘长顺 |
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| 作者单位： | 中国科学院长春光学精密机械与物理研究所;中国科学院研究生院; |
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| 基金项目： | 中国科学院三期创新工程资助项目(057X22C050) |
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| 摘 要： | 为了精确控制FSM系统中平面反射镜的偏转角度,研制了专用型光栅测微仪对其进行位置测量,以实现系统的闭环控制.在明确了FSM系统对测微仪应用需求的基础上,根据其技术原理,对光栅测微仪的小型滑轨、标尺光栅图案、指示光栅图案、绝对零位编码、指示光栅移相以及接触探头分别进行了设计与选择.经精密加工、装配、调试后,所得光栅测微仪...
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| 关 键 词： | 快速反射镜 光栅 微位移测量 增量式 |
Grating Sensor for Linear Distance Used in Fast-steering Mirror |
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| HAN Xu-dong,XU Xin-hang,WANG Bing,WANG Heng-kun,LIU Chang-shun.Grating Sensor for Linear Distance Used in Fast-steering Mirror[J].Opto-Electronic Engineering,2011(10):115-119. |
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| Authors: | HAN Xu-dong XU Xin-hang WANG Bing WANG Heng-kun LIU Chang-shun |
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| Affiliation: | HAN Xu-dong1,XU Xin-hang1,WANG Bing1,WANG Heng-kun1,LIU Chang-shun1,2 (1.Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China,2.Graduate University of Chinese Academy of Sciences,Beijing 100049,China) |
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| Abstract: | In order to control rotary angle of reflector accurately in the Fast-steering Mirror (FSM) system,a specialized grating sensor used for measuring the position of reflector to offer feedback information for servo controlling system was designed.On the basis of application requirements of grating sensor in the fast-steering mirror system,small slip track,pattern of scale gratings,pattern of index gratings,form of absolute zero code,moving index gratings and styles of measure probes were designed and chosen re... |
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| Keywords: | fast-steering mirror grating measuring for micro-length increment |
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