| 利用白光扫描干涉测量表面微观形貌 |
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| 引用本文： | 刘晨,陈磊,王军,韩志刚,师丽丽.利用白光扫描干涉测量表面微观形貌[J].光电工程,2011,38(1):71-75. |
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| 作者姓名： | 刘晨 陈磊 王军 韩志刚 师丽丽 |
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| 作者单位： | 1. 合肥工业大学,仪器科学与光电工程学院,合肥230009
2. 南京理工大学,电子工程与光电技术学院,南京210094 |
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| 基金项目： | 江苏省"六大人才高峰"资助项目，合肥工业大学科学与研究发展基金 |
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| 摘 要： | 由于激光显微干涉只能测量表面微观形貌的相对高度值,不能进行绝对测量,本文提出了白光显微干涉测量方法,研制了测量仪器,并对CCD像素格值和PZT进行了标定.该仪器以白光干涉理论为基础,利用空间频域算法计算白光干涉图零级条纹中心位置,根据零级条纹中心移动量来得到被测工件表面微观形貌.对被测工件表面进行了测试,试验结果表明:...
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| 关 键 词： | 白光干涉 微观形貌 测量 |
Measurement of Surface Topography by Using White-light Scanning Interferometry |
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| LIU Chen,CHEN Lei,WANG Jun,HAN Zhi-gang,SHI Li-li.Measurement of Surface Topography by Using White-light Scanning Interferometry[J].Opto-Electronic Engineering,2011,38(1):71-75. |
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| Authors: | LIU Chen CHEN Lei WANG Jun HAN Zhi-gang SHI Li-li |
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| Affiliation: | LIU Chen1,CHEN Lei2,WANG Jun2,HAN Zhi-gang2,SHI Li-li2 ( 1. School of Instrument Science and Optoelectronic Engineering,Hefei University of Technology,Hefei 230009,China,2. School of Electronic Engineering and Photoelectric Technology,Nanjing University of Science & Technology,Nanjing 210094,China ) |
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| Abstract: | As the laser interference microscope testing technology is only suitable for the measurement of relative altitude in surface topography testing and is not available for absolute measurement, the method by using white light interference microscope testing technology is presented. The measuring instrument based on the white light interference theory is developed, and the calibration between the pixel of CCD and PZT is carried out. The topography of the testing surface is calculated with the micro-displacement... |
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| Keywords: | white light interference topography measurement |
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