一种高分辨力、大行程微驱动压电马达

样机采用叠片式压电驱动器作为驱动源,利用一对夹爪与丝杠之间的惯性滑移效应实现纳米级微位移驱动,而用丝杠副实现自锁。微位移测量采用高精度电感式测微仪与光学干涉仪。样机平均位移分辨力为5～15nm,驱动力60N,行程15mm。分析表明,对性能的主要影响因素是驱动脉冲参数及丝杠的爬行现象,这为LSPM的进一步优化提供了依据。

A piezomotor with high-resolution and large-stroke driving features

The prototype uses laminated PZT devices as driving source. Nanometer micro-displacement driving is achieved by means of inertial sliding effect between a pair of clamping jaws and leading screw. Self-locking is performed by leading screw pair. The measurement of micro-displacement uses high-accuracy inductance type micrometer and optical interferometer. The average displacement resolution of the prototype is 5-15nm, driving force 60N, stroke 15mm. Analysis shows that the main influence factors on performance are driving pulse parameters and crawl effect. This provides basis for further optimization of linear step piezomotor.