Fabrication and comparative study of top-gate and bottom-gate ZnO–TFTs with various insulator layers |
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Authors: | XinAn Zhang JingWen Zhang WeiFeng Zhang Xun Hou |
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Affiliation: | (1) School of Physics and Electronics, Henan University, 475001 Kaifeng, People’s Republic of China;(2) Key Laboratory of Photonics Technology for Information, Xi’an Jiaotong University, 710049 Xi’an, People’s Republic of China; |
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Abstract: | Transparent ZnO thin film transistors (ZnO–TFTs) with different structures and dielectric layers were fabricated by rf magnetron
sputtering. The PbTiO3, AlO
x
, SiN
x
and SiO
x
films were attempted to serve as the gate dielectric layers in the devices, respectively, and XRD was employed to investigate
the crystal structure of ZnO films deposited on these dielectric layers. The optical properties of transparent TFTs were measured
and revealed the average transmittance ranged from 60 to 80% in the visible part of the spectrum. Electrical measurement shows
the properties of the ZnO–TFTs have great relations with the device structure. The bottom-gate TFTs have better behaviors
than top-gate ones with the mobility, threshold voltage and the current on/off ratio of 18.4 cm2 V−1 s−1, −0.7 V and 104, respectively. The electrical difference of the devices may be due to different character of the interface between the channel
and dielectric layers. |
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Keywords: | |
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