高精密厂房中高精密平台控制仿真模拟

为进一步提高高精密厂房中平台的隔振效果，在平台控制中考虑超磁致伸缩作动器的非线性特性对多自由度平台混合控制系统产生一定的制约作用，因此将四个超磁致伸缩作动器模型植入混合控制系统进行设计。首先建立一个以空气弹簧和超磁致伸缩作动器为基本元件的多自由度微振动混合控制系统，然后利用Jiles-Atherton模型的概念建立超磁致伸缩作动器的非线性及其逆补偿模型，并将所建立的作动器模型与多自由度微振动控制系统结合。最后对基于作动器模型的混合控制系统与被动控制系统下的高精密平台响应进行对比分析，取得较好的控制效果，为其在实际工程应用中提供可靠的理论依据。

Simulation Analysis of Multi DOF Platform Control in High Precision Plant Based on Actuator Models

In the control design, the nonlinearity of giant-magnetostrictive actuators has some effect on hybrid control system for a multi-degree of freedom（MDOF） platform. To improve the platform＇ s vibration isolation effect in a high precision plant, four giant-magnetostrictive actuator models were built in the hybrid control system. First of all, the MDOF hybrid control system was established with the air springs and the giant-magnetostrictive actuators as the basic components. Then, the concept of Jiles-Atherton model was used to establish a non linear model and an inverse compensation model for the giant-magnetostrictive actuator. And the established models were combined with the MDOF micro-vibration control system later on. Finally, the high precision platform＇ s response of the based on hybrid control system actuator model was compared with the response of passive control systems. It showed that the hybrid control system has a good control effect. This work has provided a reliable theoretical basis for practical application of the giant-magnetostrictive actuator models.