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Cu Diffusion in Co/Cu/TiN Films for Cu Metallization
作者姓名:Xiuhua  CHEN  Xinghui  WU  Jinzhong  XIANG  Zhenlai  ZHOU  Heyun  ZHAO  Liqiang  CHEN
作者单位:Department of Materials Science and Engineering, Yunnan University, Kunming 650091, China
基金项目:教育部留学回国人员科研启动基金,Key Project of Yunnan University
摘    要:Some information on how to use in-situ determined diffusion coefficient of Cu to make barrier layer of Cu metallization in ultra large scale integrations (ULSIs) was provided. Diffusion coefficients of Cu in Co at low temperature were determined to analyze Cu migration to Co surface layer. The diffusion depths were analyzed using X-ray photoelectron spectroscopy (XPS) depth profile to investigate the diffusion effect of Cu in Co at different temperatures. The possible pretreatment temperature and time of barrier layer can be predicted according to the diffusion coefficients of Cu in Co.

关 键 词:钴/铜/氮化钛薄膜  镀铜  铜扩散  喷涂法
收稿时间:2005-01-11
修稿时间:2005-08-12

Cu Diffusion in Co/Cu/TiN Films for Cu Metallization
Xiuhua CHEN Xinghui WU Jinzhong XIANG Zhenlai ZHOU Heyun ZHAO Liqiang CHEN.Cu Diffusion in Co/Cu/TiN Films for Cu Metallization[J].Journal of Materials Science & Technology,2006,22(3):342-344.
Authors:Xiuhua CHEN  Xinghui WU  Jinzhong XIANG  Zhenlai ZHOU  Heyun ZHAO  Liqiang CHEN
Affiliation:Department of Materials Science and Engineering, Yunnan University, Kunming 650091, China
Abstract:Some information on how to use in-situ determined diffusion coefficient of Cu to make barrier layer of Cu metallization in ultra large scale integrations (ULSIs) was provided. Diffusion coefficients of Cu in Co at low temperature were determined to analyze Cu migration to Co surface layer. The diffusion depths were analyzed using X-ray photoelectron spectroscopy (XPS) depth profile to investigate the diffusion effect of Cu in Co at different temperatures. The possible pretreatment temperature and time of barrier layer can be predicted according to the diffusion coefficients of Cu in Co.
Keywords:Cu diffusion  Sputtering method  Co/Cu/TiN film  Metallization
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