Model-based optical resolution |
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Authors: | den Dekker AJ |
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Affiliation: | Dept. of Appl. Phys., Delft Univ. of Technol.; |
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Abstract: | This paper considers the two-point resolution of imaging systems from the viewpoint of model fitting theory. Earlier results have been extended to include (partially) coherent sources of unknown intensity. Furthermore, it is shown how the probability of resolution can be computed. This probability can be used to compare the performance of different imaging systems |
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