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High‐Speed Spatial Atomic‐Layer Deposition of Aluminum Oxide Layers for Solar Cell Passivation |
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| Authors: | Paul Poodt Adriaan Lankhorst Fred Roozeboom Karel Spee Diederik Maas Ad Vermeer |
| Affiliation: | 1. TNO Science & Industry, PO Box 6235, 5600 HE Eindhoven (The Netherlands);2. Department of Applied Physics, Eindhoven University of Technology, PO Box 513, 5600 MB Eindhoven (The Netherlands);3. Holst Centre, High Tech Campus 31, 5656 AE Eindhoven (The Netherlands) |
| Abstract: | |
| Keywords: | aluminium oxide gas earing solar cells spatial atomic layer deposition surface passivation |
