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压电陶瓷的非线性特性校正研究
引用本文:缪建,朱若谷,郭斌,黄宇.压电陶瓷的非线性特性校正研究[J].中国计量学院学报,2010,21(4).
作者姓名:缪建  朱若谷  郭斌  黄宇
作者单位:中国计量学院计量测试工程学院
摘    要:讨论了非线性对正弦相位调制Fabry-Perot(F-P)干涉术的影响.当用分块积分讨论相调F-P干涉术的输出光强,并作近似处理时,就可以给出类似的结果,所以把这种方法进一步推广到对相调F-P干涉术的研究中.同时提出了两种测量压电陶瓷非线性系数的方法,在实际测量得到的非线性系数基础上,完成`影响大小的数值计算和实验研究.最后证明提出,相调F-P干涉术的初相位应选择在π/4附近以及它可用于测量精细表面的粗糙度或其轮廓.

关 键 词:压电陶瓷  非线性  Fabry-Perot干涉术  相位调制Fabry-Perot干涉术

Nonlinear effect of piezoelectric ceramics on the phase modulation Fabry-Perot interferometry
MIAO Jian,ZHU Ruo-gu,GUO Bing,HUANG Yu.Nonlinear effect of piezoelectric ceramics on the phase modulation Fabry-Perot interferometry[J].Journal of China Jiliang University,2010,21(4).
Authors:MIAO Jian  ZHU Ruo-gu  GUO Bing  HUANG Yu
Affiliation:MIAO Jian; ZHU Ruo-gu; GUO Bing; HUANG Yu(College of Metrology and Measurement Engnieering; China Jiliang University; Hangzhou 310018; China);
Abstract:The nonlinear piezoelectric effect of piezoelectric ceramics on the sinusoidal phase modulation Fabry-Perot(F-P) interferometry was mainly discussed besides an introduction of the analysis of this effect on the block integral phase modulation interferometer.When discussing the output light of the phase modulation F-P interferometry in paragraphs and adopting a suitable approximating,a similar conclusion was drawn.So this method could be further extended into the study of the phase modulation F-P interferome...
Keywords:piezoelectric ceramics  nonlinear piezoelectric effect  Fabry-Perot interferometry  phase modulation Fabry-Perot interferometry
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