MEMS麦克风灵敏度异常的失效分析

MEMS麦克风是一种将音频信号转换成电信号的微型传感器,目前应用比较普遍,在产品应用的过程中会遇到不同的产品失效的问题,若对MEMS麦克风的失效样品进行归类分析,找到产品失效的根本原因,对产品的生产和应用将具有非常重要的意义。本文主要针对麦克风众多失效问题的一种--灵敏度异常问题,应用显微镜、扫描电镜(SEM)和聚焦离子束(FIB)等设备对其失效样品地进行了深入的分析,总结了此类失效分析样品的分析思路和失效机理,对MEMS麦克风样品的失效分析研究有很好的借鉴意义。

Failure Analysis of MEMS Microphone Abnormal Sensitivity

MEMS microphone is a micro-device which converts audio signal into electrical signals, its application is more common at present. Many failure phenomena are happened when using the microphone product. It is of great significance on microphone production and application when performing failure analysis on microphone production with classification method to find the root cause. This paper summarizes the failure analysis method and process on microphone abnormal sensitivity with microscope, SEM, FIB and other method according to failure phenomena, this article has great implication on the failure research of the MEMS product.