Squeeze-film effects in MEMS devices with perforated plates for small amplitude vibration |
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Authors: | C Feng Ya-Pu Zhao D Q Liu |
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Affiliation: | (1) State Key Laboratory of Nonlinear Mechanics (LNM), Institute of Mechanics, Chinese Academy of Sciences, Beijing, 100080, China;(2) Department of Mathematics and Mechanics, University of Science and Technology Beijing, Beijing, 100083, China |
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Abstract: | Squeeze-film effects of perforated plates for small amplitude vibration are analyzed through modified Reynolds equation (MRE).
The analytical analysis reckons in most important influential factors: compressibility of the air, border effects, and the
resistance caused by vertical air flow passing through perforated holes. It is found that consideration of air compressibility
is necessary for high operating frequency and small ratio of the plate width to the attenuation length. The analytical results
presented in this paper agree with ANSYS simulation results better than that under the air incompressibility assumption. The
analytical analysis can be used to estimate the squeeze-film effects causing damping and stiffness added to the system. Since
the value of Reynolds number involved in this paper is low (< 1), inertial effects are neglected. |
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