| 悬臂梁接触式RF MEMS开关的关键工艺研究 |
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| 引用本文： | 吴清鑫,陈光红,于映,罗仲梓.悬臂梁接触式RF MEMS开关的关键工艺研究[J].传感器与微系统,2009,28(9):118-120. |
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| 作者姓名： | 吴清鑫 陈光红 于映 罗仲梓 |
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| 作者单位： | 吴清鑫,陈光红(苏州市职业大学,电子信息工程系,江苏,苏州,215104);于映(南京邮电大学,通讯与信息工程学院,江苏,南京,210003);罗仲梓(厦门大学,萨本栋微机电研究中心,福建,厦门,361005) |
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| 基金项目： | 国家青年基金资助项目，福建省自然科学基金资助项目 |
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| 摘 要： | 采用厚度为2μm的Au制作成共平面波导（CPW）、聚酰亚胺作为牺牲层、PECVD法淀积Si3N4薄膜作为悬臂梁，制作成悬臂梁接触式RF MEMS开关。着重对开关的关键工艺-CPV的Au剥离工艺和悬臂梁制作工艺进行研究，讨论了工艺中存在的问题及其解决方法。通过实验获得较佳的工艺参数，并制作出驱动电压为12-20V的悬臂梁接触式RF MEMS开关。
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| 关 键 词： | 射频MEMS开关 剥离 悬臂梁 制作工艺 |
Stud on key fabrication process of RF MEMS switch with cantilever structure |
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| Affiliation: | WU Qing-xin , CHEN Guang-hong, YU Ying, LUO Zhong-zi( 1. Department of Electronic Information Engineering, Suzhou Vocational University, Suzhou 215104, China 2. College of Telecommunications ＆ Information Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210003, China; 3. Sah Pendung MEMS Research Center, Xiamen University, Xiamen 361005, China) |
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| Abstract: | Co-planar wave-guide is coated with 2|xm thick Au film. Polyimide is used as sacrificial layer. Si_3N_4 suspending membrane is grown by plasma enhanced chemical vapor deposition ( PECVD). RF MEMS switch with cantilever structure is fabricated by the above processes. The key fabrication technology of RF MEMS switch is discussed including lift-off technology of Au film as co-planar wave-guide and fabrication process of suspending membrane. The optimum process parameters are obtained by different experiments. RF MEMS switch with cantilever structure with 12 ～20 V actuation voltage is sucessfully fabricated. |
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| Keywords: | RF MEMS switch lift-off cantilever fabrication process |
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