表面粗糙度光学测量方法研究进展

表面粗糙度对工件的性能有很大的影响,由于机械、电子及光学工业的飞速发展,对精密机械加工表面的质量及结构小型化的要求日益提高,使得表面粗糙度测量显现出越来越重要的地位。采用光学方法测量表面粗糙度具有非接触、无损伤、测量精度高等优点。介绍了用光散射法、像散法、散斑法、光干涉法、光学触针法测量表面粗糙度的原理及研究进展,讨论了上述方法各自的优缺点,对表面粗糙度测量的发展方向进行了预测。

Progress on optical measurement of surface roughness

The function of the workpiece is highly influenced by its surface roughness. With the rapid development of the mechanical, electronic and optical industries, the quality of surface and minimized-structure of precision mechanism are highly demanded ,which makes surface roughness measurement take on more and more important position. Optical methods of measuring surface roughness have many advantages such as non-contact, non-damage and high precision etc. The principles and advances of scattering method, speckle method, interferometrlc method, optical stylus method widely used for roughness measurement are reviewed, the merits and shortcomings of them are discussed, their developing trends are forecasted.