| 一种二维微位移平台测量系统的研究 |
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| 引用本文： | 马静华,葛运建,吴仲城,孟明,沈春山,申飞,石 振.一种二维微位移平台测量系统的研究[J].传感技术学报,2005,18(4):739-741,744. |
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| 作者姓名： | 马静华 葛运建 吴仲城 孟明 沈春山 申飞 石 振 |
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| 作者单位： | 1. 科学院合肥智能机械研究所,合肥230031;中国科学技术大学自动化系,合肥230026
2. 科学院合肥智能机械研究所,合肥230031 |
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| 摘 要： | 微位移测量已经广泛应用于精密测量领域中,实现微位移测量最关键的环节在于精确的定位和精细的运动.文章设计了一种基于应变方式进行二维微位移(纳米级)测量的系统,详细阐述了该系统主要组成部分:微位移检测传感器、处理电路及相关系统软件.实验结果表明该系统可以满足二维微(纳米级)测量的要求.
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| 关 键 词： | 微位移 应变式 微处理器 |
| 文章编号： | 1005-9490（2005）04-0739-03 |
| 收稿时间： | 2005-01-18 |
| 修稿时间： | 2005-01-18 |
Study of a Measurement System for Two2Dimensional Micro2Disp |
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| MA J i nghu,GE Yunj i an,WU Zhon gchen g,M EN G Mi ng,S H EN Chunshan,S H EN f ei,S H I Zhen.Study of a Measurement System for Two2Dimensional Micro2Disp[J].Journal of Transduction Technology,2005,18(4):739-741,744. |
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| Authors: | MA J i nghu GE Yunj i an WU Zhon gchen g M EN G Mi ng S H EN Chunshan S H EN f ei S H I Zhen |
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| Affiliation: | 1. Institute of Intelligent Machines, Chinese Academy of Sciences, Hefei 230031, China; 2. Dept. of Automation, University of Science and Technology of China, Hefei 230026, China |
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| Abstract: | Micro-displacement measurement has already been applied in the accurate measurement field extensively and the key of it lies in the accurate localization and movement. The design of a measurement system based on strain gauge for two-dimensional micro-displacement is introduced. The components which include micro-displacement measurement sensor, circuits and software are represented. The experiment result shows that it can be utilized to measure two-dimensional micro-displacement on micron or nanometer level. |
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| Keywords: | micro-displacement strain gauge MCU |
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