基于版图和工艺的MEMS器件三维结构生成算法

设计了一种MEMS器件三维结构生成的方法,介绍了结合工艺流程实现转换的全过程,对相关算法进行了详细论述.结合工艺流程时首先将二维版图文件预处理,加载器件工艺流程后,程序实现相关参数选择后并存储.给定了工艺步骤的搭配关系,进行工艺解释后,进行三维实体绘制输出.编程实现的可执行文件可对多种MEMS器件进行正确的三维描述,从而验证了该三维生成的方法.

Three-dimensional Structure Building Algorithm of MEMS Device Based on Layout And Process

A kind of three-dimensional structure building method of MEMS device is presented. The whole procedure of realizing 3-dimensional structure conversion is introduced. Some related algorithms of polygon partition, process explanation and 3-dimensional structure building have been emphasized here. According to process flows and parameters of MEMS device chosen by user, conversion is implemented from pretreating of 2-dimensional layout file to loading of process flows, from correlative parameters choosing to process steps matching, up to processes explanation in the end to realize 3-dimensional solid structure of devices. Based on above course, an executable file is built by programming. Some kinds of MEMS devices have been described correctly in 3-dimensional space by the executable file which validates this three-dimensional building method.