压电/磁电复合式MEMS振动驱动微能源的研究

为了满足无线传感网络节点对供电电源的自供电、低功耗、持续稳定供电的要求，研究了一种可以将环境中机械能转化为电能的MEMS压电-磁电复合式振动驱动微能源，结合压电转换与磁电转换把振动能转换为电能。建立数学模型，用有限分析软件Ansys12.0对不同尺寸的四悬臂梁-中心质量块结构进行力学特性分析，并对加工出的器件进行性能测试。测试结果表明，谐振频率为290Hz下，器件输出电压峰峰值随振动加速度的增加呈线性增加，1 m/s2和6 m/s2激励下有效输出电压分别为61mV和324mV，有望为无线网络传感节点提供性能高、寿命长、自供给的供电电源。

Research of MEMS Piezoelectric and Electromagnetic Hybrid Vibrational Micro-power Harvesting Devices

A MEMS vibration micro-power based on piezoelectric and electromagnetic hybrid Effect was proposed, which is an important developing for the wireless sensor network node power supply from the power supply,low pow?er consumption,stable power supply. The micro-power combines the advantages of the piezoelectric and electromag?netic which is the transformation of the vibration energy into electric energy. The calibration method and finite ele?ment method for the accelerometer of different sizes was proposed to present the experimental results. The experi?mental results show that the maximum effective output voltage of the device is 61 mV and 324 mV under 1 m/s2和6 m/s2 and the resonant of 290 Hz. And it is expected to solve the high performance,long service life,power supply problem of wireless sensor network nodes.