基于电镀技术的微间隔制作及在气体检测中应用的研究

本文开发了一种基于电离现象的气体传感器。文章首先研究了采用低成本的电镀方法来制作具有微米间隔的镍电极对，然后通过测试在不同条件下电极对的击穿电压和电流来实现气体检测。实验结果表明该器件对乙醇气体，其击穿电压在300 V左右；而对水蒸气，其击穿电压在320 V左右。同时，对乙醇而言，随着乙醇浓度的增加，在同一击穿电压下击穿电流也不断增大。对不同浓度的水蒸气的实验中也得到相类似的结果。

The Fabrication of Micro Gap by Electroplating and the Applications to Gas Detecting

A kind of new gas sensor was developed based on gas ionization. The sensor consists of a micro gap between two metal electrodes, which were fabricated by electroplating. During the experiments, an electrical voltage was applied on the micro gap and the breakdown voltage and current were measured. The experimental results show that the breakdown voltages of micro gap in ambient air with ethanol vapor and water vapor are different. Meanwhile, as the concentration of ethanol vapor increases, the charging current increases linearly. For water vapor, the similar results were obtained.