An approach to regulating machine sharing in reconfigurable back-end semiconductor manufacturing

By complying with the operational philosophy of virtual production lines, a back-end semiconductor manufacturing system can be controlled and managed with better reconfigurability. However, due to the absence of a fully-integrated information system and the gaining popularity of distributed computing, machine reconfiguration decisions are made by machine controllers on the shop floor where heterarchical control architecture is typically used. This research investigates how non-cooperative game theory could be applied for facilitating the decision process reconfiguration decision-making at the machine controller level as machines are competed by multiple jobs streams. This paper presents how material flow traffic can be better regulated in a reconfigurable manufacturing environment. A study using an industrial pilot system is discussed to demonstrate the applicability of the proposed approach, in which heuristics are used to determine the game specification.