| DeviceNet现场总线在MOCVD设备上的应用 |
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| 引用本文： | 肖慧,林博奇.DeviceNet现场总线在MOCVD设备上的应用[J].江苏电器,2014(7):32-35. |
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| 作者姓名： | 肖慧 林博奇 |
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| 作者单位： | 中国电子科技集团公司第48研究所,湖南长沙410111 |
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| 摘 要： | 以MOCVD设备为例,介绍一种基于DeviceNet现场总线标准,采用远程DeviceNet扫描仪SST-END-1-C2与流量控制器、压力控制器构成现场总线控制网络。给出了DeviceNet软件设计与控制实现。使用效果表明DeviceNet是基于CAN总线技术的一种低成本的通信链接,是一种低端网络系统,具有低成本、高效率、高可靠性的特点。
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| 关 键 词： | DeviceNet现场总线 CAN总线 MOCVD设备 |
Application of DeviceNet Field Bus in MOCVD Equipment |
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| Authors: | XIAO Hui LIN Bo-qi |
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| Affiliation: | (The ForD,-Eighth Research Institution of China Electronic Science and Technology Group Company, Changsha 410111, China) |
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| Abstract: | Taking MOCVD equipment for example, this paper introduced a kind of standard based on DeviceNet field bus. The field bus control network consisted of the remote DeviceNet scanner, SST-END-1-C2, flow controllers and pressure controllers. This paper gave the software design of DeviceNet and control implementation. The use effectiveness of DeviceNet shows that DeviceNet is a kind of low cost communication link based on CAN bus technology, a kind of low network system with low cost, high efficiency and high reliability characteristics. |
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| Keywords: | DeviceNet field bus CAN bus MOCVD equipment |
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