一种二级曲面测量装置的设计及其不确定度的标定

本文研制了一种二级曲面扫描测量装置,目的是解决传感器高精度和大量程之间的矛盾,让矢高较大的曲面的测量成 为可能。 采用二级测量系统,对高精度传感器的量程进行扩展,实现大量程高精度的曲面扫描测量。 二级测量系统采用音圈电 机驱动柔性铰链带动高精度传感器做直线运动,使被测曲面始终保持在高精度传感器的测量范围内并由高精度传感器的测量 数据作为一级测量数据,高精度光栅尺对柔性铰链的位移测量数据作为二级测量数据,通过对两级测量数据进行处理即可获得 测量点信息,最终实现了 5 mm 的量程扩展。 同时,高精度光栅尺还作为柔性铰链伺服系统反馈装置。 随后对二级测量系统进 行性能评估,对其不确定度进行了分析计算,最后对测量装置的大量程扫描能力进行了实验验证,证明该装置具备大量程扫描 测量的能力。

Design of a dual-stage surface measuring device and its uncertainty calibration

In this paper, a dual-stage curved surface scanning measuring device is developed. The purpose is to solve the contradiction between the high precision and the large range of the sensors, which makes it possible to measure the curved surface with a large height difference. A dual-stage measurement system is used to expand the range of the high-precision sensor so that a scanning measurement for curved surfaces with a large range and high-precision is realized. The dual-stage measurement system uses a voice coil motor to drive the flexure hinge to move the high-precision sensor in a straight line, so the measured surface can be kept within the measurement range of the high-precision sensor. The measurement data of the high-precision sensor is taken as the first-stage measurement data, and the measurement data of displacement of the flexure hinge by the high-precision grating encoder is taken as the second-stage measurement data. The information of the measurement point can be obtained by processing the data of the dual-stage measurement system, and the range of 5 mm can finally be realized. At the same time, the high-precision grating encoder is also used as the feedback device of the servo system. Then, the performance of the dual-stage measurement system is evaluated, and the measurement uncertainty is analyzed and calculated. Finally, experiments are carried out on the large range scanning capability of the measuring device, which proves that the device has the ability of large range scanning measurement.