内箝位/外驱动型压电精密步进旋转驱动电机研究

提出一种新型的压电精密步进旋转驱动电机。该驱动电机以仿生运动的原理，以压电陶瓷叠堆为动力源，采用定子内侧箝位及转子外驱动的方式和薄壁柔性铰链微变形结构，提高了该驱动电机箝位的稳定性和步进旋转的稳定性。通过静力学有限元分析和动力学分析，较深入的研究了该驱动电机的运动特性。研制的压电精密步进旋转驱动电机能够实现高频率(40Hz)，较高速度(325mrad /s)，大行程(>360°)，高分辨率(1mrad/step)，较大驱动力(30N×cm)等特点，提高了压电精密步进旋转驱动电机的驱动性能。该驱动电机在精密运动、微操作、光学工程、精密定位等精密工程中有广阔的应用前景。

Study on Precision Piezoelectric Rotary Step Motor With Inner Clamp and Outer Drive

A new precision rotary PZT actuator was proposed to improve its drive capabilities. The actuator is based on the piezoelectric (PZT) technology. The actuator adopts the principle of bionics and works with a new method of stator inner clamp /rotor outer drive and a distortion structure of thin shelf flexible hinge. This structure improved stability of its clamp and step rotary. Its characteristic was analyzed from the finite element analyses. The experiment shows that the new rotary PZT actuator worked with high frequency (40Hz), high speed (325μrad/s), large travel (360°), high resolution(1μrad/step) and high torque (30N·cm). The actuator will be applied for large travel and high resolution driving device, optics engineering, precision positioning and some micro-manipulation field.