| 磁性微电子机械系统(MMEMS)的应用 |
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| 引用本文： | 耿笑炎,石玉,张怀武,尉旭波.磁性微电子机械系统(MMEMS)的应用[J].磁性材料及器件,2004,35(6):34-36. |
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| 作者姓名： | 耿笑炎 石玉 张怀武 尉旭波 |
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| 作者单位： | 电子科技大学,微电子与固体电子学院,四川,成都,610054;电子科技大学,微电子与固体电子学院,四川,成都,610054;电子科技大学,微电子与固体电子学院,四川,成都,610054;电子科技大学,微电子与固体电子学院,四川,成都,610054 |
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| 摘 要： | 微电子机械系统(MEMS)技术结合磁性材料的特性,会产生许多新的功能,并在很多领域得到应用,如信息技术、汽车工业、生物医学,航空以及科学仪器等.本文阐述了在微米尺寸下,磁性MEMS相对于静电和压电执行器,在强度、偏振、执行距离等方面具有的优势,并就磁性MEMS现有及潜在的应用加以概述.
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| 关 键 词： | 磁性MEMS 传感器 应用 |
| 文章编号： | 1001-3830(2004)06-0034-03 |
| 修稿时间： | 2004年6月10日 |
The Applications of Magnetic Micro-electro-mechanical-system(MMEMS) |
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| GENG Xiao-yan,SHI Yu,ZHANG Huai-wu,WEI Xu-bo School of Micro-Electronics and Solid-Electronics,University of Electronic Science and Technology of China,Chengdu ,China.The Applications of Magnetic Micro-electro-mechanical-system(MMEMS)[J].Journal of Magnetic Materials and Devices,2004,35(6):34-36. |
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| Authors: | GENG Xiao-yan SHI Yu ZHANG Huai-wu WEI Xu-bo School of Micro-Electronics and Solid-Electronics University of Electronic Science and Technology of China Chengdu China |
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| Affiliation: | GENG Xiao-yan,SHI Yu,ZHANG Huai-wu,WEI Xu-bo School of Micro-Electronics and Solid-Electronics,University of Electronic Science and Technology of China,Chengdu 610054,China |
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| Abstract: | MEMS incorporated with magnetic materials as the sensing or active element may offer new functions and open new markets in the information technology, automotive, biomedical, aerospace and instrumentation. At the micrometer scale magnetic MEMS offer distinct advantages over the electrostatic and piezoelectric actuators in strength, polarity and distance of actuation. In this article, we will present some of the existing and future applications. |
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| Keywords: | MMEMS sensor application |
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