Mechanical and electric fatigue of PZT(53/47) films on metallic substrates |
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Authors: | T Hauke H Beige M Giersbach S Seifert D Sporn |
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Affiliation: | 1. University of Halle, F.-Bach-Platz 6 , 06108 Halle, Germany;2. Fraunhofer-lnstitut für Silicatforschung , 97082, Würzburg, Germany |
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Abstract: | Abstract We have investigated the fatigue of electromechanical and dielectric properties of sol-gel derived PZT(53/47) thin films deposited on metallic substrates by means of electric and mechanical cycling. For the mechanical cycling a two point bending method was used to apply transversal stress to the samples. During mechanical cycling the piezoelectric coefficient d31 remained constant up to about 105 cycles, for a higher number of cycles a strong decrease was observed. During electric cycling no significant changes in the ferroelectric and electromechanical hysteresis loops could be found up to about 3×105 cycles. Above this number the coercive field increases, the maximum strain and the remanent polarization decrease. Obviously each electric cycling of the investigated films is accompanied by a mechanical cycling. It is assumed, that microcracks induced by mechanical stress are the main reason for the deterioration of the physical properties films during electric and mechanical cycling both. |
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Keywords: | PZT thin films piezoelectricity fatigue |
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