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Atomistic effect of delta doping layer in a 50 nm InP HEMT
Authors:N Seoane  A J García-Loureiro  K Kalna  A Asenov
Affiliation:(1) Department of Electronics and Computer Science, Univ. Santiago de Compostela, Campus Sur, 15706 Santiago de Compostela, Spain;(2) Department of Electronics & Electrical Engineering, University of Glasgow, Glasgow, G12 8LT, Scotland, United Kingdom;(3) Departamento de Electrónica e Computación, Universidade de Santiago de Compostela, Campus Sur, 15706 Santiago de Compostela, Spain
Abstract:Fluctuations caused by discreteness of charge will play an important role when devices are scaled to gate lengths approaching nanometer dimensions. In this paper, we use a 3D drift-diffusion simulator to study an influence of discrete random dopant charges in the delta doping layer of a 50 nm gate length InP high electron mobility transistor.
Keywords:3D simulation  Parallel solvers  Random dopants  Drift-diffusion  HEMT
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