| 取向铁电薄膜制备中主要工艺影响因素的研究进展 |
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| 引用本文： | 贺海燕.取向铁电薄膜制备中主要工艺影响因素的研究进展[J].西北轻工业学院学报,2004,22(5):153-156. |
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| 作者姓名： | 贺海燕 |
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| 作者单位： | 陕西科技大学材料科学与工程学院 陕西咸阳712081 |
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| 摘 要： | 取向铁电薄膜的取向度取决于其制造时的几个主要工艺影响因素，如基片特性、溶液先驱体化学、热处理等。在取向铁电薄膜的研究中已经对这些工艺因素有了比较明确的认识，作者概述了近年来这些工艺因素的研究进展。
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| 关 键 词： | 取向铁电薄膜 取向度 制备 基片特性 溶液先驱体化学 |
| 文章编号： | 1000-5811(2004)05-0153-04 |
| 修稿时间： | 2004年6月11日 |
BRIEFLY ANALYSIS ON TECHNOLOGY FACTORS OF ORIENTED FERROELCTRIC THIN FILM |
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| HE Hai-yan.BRIEFLY ANALYSIS ON TECHNOLOGY FACTORS OF ORIENTED FERROELCTRIC THIN FILM[J].Journal of Northwest University of Light Industry,2004,22(5):153-156. |
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| Authors: | HE Hai-yan |
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| Abstract: | The dgree of orientation of ferroelectric thin film briefly depended on three technological factors that are substract,solution chemistry,heat treatment condition which was investigated in detail in study of ferroelectric thin film.The understandings of the factors was summarized in this paper. |
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| Keywords: | orientation ferroelectric thin film technological factor |
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