Fabrication of ceramic particles from preceramic polymers using stop flow lithography

Stop flow lithography (SFL) combines aspects of microfluidic and photolithography to continuously fabricate particles with uniform planar shapes as dictated by a mask. In this work we aim to expand the palette of materials suitable for SFL processing by investigating the use of UV-crosslinkable preceramic polymers to make ceramic particles. A commercially available methacrylated-polysiloxane was used as the preceramic polymer and was mixed with 2.5 wt% Irgacure 651 photoinitiator. A simple SFL system was assembled to continuously fabricate UV-crosslinked preceramic polymer particles in the shape of hexagons, triangles, and gears with diameters ranging from 100 to 200 μm and thicknesses of 74 μm +/- 4 μm. Particles were harvested from the excess preceramic solution, cleaned and then pyrolyzed at 1000 °C to transform them into silicon oxycarbide ceramic particles. Particle shape was maintained during pyrolysis despite a ～80 % linear shrinkage due to the removal of acryl and methyl side groups, as confirmed via FTIR. After pyrolysis the outer diameters of the SiOC particles ranged from 20 to 40 μm with thicknesses of 10 μm–12 μm. Pyrolyzed particles were successfully recovered and dispersed in water. This work demonstrates a robust path for the fabrication of ceramic particles with specific shapes from preceramic polymers via SFL.