| 二氧化钛薄膜制备工艺的研究进展 |
| |
| 引用本文： | 张 帅,张立生,李 慧,张汉鑫,梁精龙.二氧化钛薄膜制备工艺的研究进展[J].无机盐工业,2019,51(7):15-18. |
| |
| 作者姓名： | 张 帅 张立生 李 慧 张汉鑫 梁精龙 |
| |
| 作者单位： | 华北理工大学冶金与能源学院现代冶金技术教育部重点实验室，河北唐山 063210 |
| |
| 基金项目： | 国家自然科学基金项目(51674120);河北省自然科学基金项目(E2016209163);河北省高等学校科学技术研究项目(BJ2017050) |
| |
| 摘 要： | 二氧化钛薄膜是一种具有光、电特性的廉价的半导体材料,近年来受到研究人员的广泛关注,二氧化钛薄膜的这些特殊性能使其应用于诸多领域。不同的制备工艺可以得到性能不同的二氧化钛薄膜,使其适用于相关领域。简要叙述了二氧化钛薄膜的基本特性及应用,主要介绍了电化学法、溅射法、溶胶-凝胶法和水解沉淀法等二氧化钛薄膜制备工艺的原理、研究现状和优缺点,并根据各工艺的不足,指出了今后的发展趋势。
|
| 关 键 词： | TIO2薄膜 电化学法 溅射法 光催化 |
Progress in preparation process of TiO2 thin films |
| |
| Zhang Shuai,Zhang Lisheng,Li Hui,Zhang Hanxin,Liang Jinglong.Progress in preparation process of TiO2 thin films[J].Inorganic Chemicals Industry,2019,51(7):15-18. |
| |
| Authors: | Zhang Shuai Zhang Lisheng Li Hui Zhang Hanxin Liang Jinglong |
| |
| Affiliation: | Key Laboratory of Ministry of Education for Modern Metallurgy Technology，College of Metallurgy and Energy，North China University of Science and Technology，Tangshan 063210，China |
| |
| Abstract: | TiO2 film is an inexpensive semiconductor material with optical and electrical properties，which has attracted wide attention from researchers in recent years.These special properties of TiO2 film make it suitable for many fields.Different preparation processes can obtain TiO2 films with different properties，making them suitable for related fields.The basic characteristics and applications of TiO2 thin films were briefly described.The principle，research status，advantages and disadvantages of electrochemical method，sputtering method，sol-gel method and hydrolysis precipitation method were mainly introduced. According to the shortcomings of each technology，the development trend in the future was pointed out. |
| |
| Keywords: | TiO2 thin films electrochemical method sputtering method photocatalysis |
| 本文献已被 CNKI 维普 等数据库收录！ |
| 点击此处可从《无机盐工业》浏览原始摘要信息 |
|
点击此处可从《无机盐工业》下载全文 |
