Modeling for particle size prediction and mechanism of silicon nitride nanoparticle synthesis by chemical vapor deposition

Particle size is a vital characterization for silicon nitride nanoparticle as its scale determines its application area. Particle size prediction for synthesis of silicon nitride nanoparticle by chemical vapor deposition (CVD) is much needed. In this study, a model is proposed for particle growth during silicon nitride nanoparticle synthesis by CVD in order to predict particle size. Comparison between modeling and experimental results validated the model. The modeling results showed that lower pressure in the condensation room would be an effective way of obtaining silicon nitride nanoparticles with smaller particle size. An expression is established to reveal the relation between the mean particle diameter of silicon nitride nanoparticle and pressure in the condensation room based on the modeling. The modeling method is capable of predicting the mean particle size of ultrafine silicon nitride powder to within 3.6% accuracy. Corresponding manufacturing thermal parameters are recommended for silicon nitride nanoparticle production with different mean particle sizes. Modeling and analysis in this article may provide theoretical guidance for production of silicon nitride nanoparticle by CVD.

© 2017 American Association for Aerosol Research