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Growth kinetics of the ferroelectric Al-doped HfO2 thin films via synergistic effect of various essential factors |
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| Authors: | Yanhu Mao Wanli Zhang Lian Cui Minghua Tang Pengyu Su Xiaojiang Long Gang Li Yongguang Xiao Shaoan Yan |
| Abstract: | |
| Keywords: | Hafnium aluminium oxide Ferroelectric phase Growth kinetic The optimum preparation Synergistic effect |
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