High-speed and low-driving-voltage X-cut LiNbO3 opticalmodulator with two step backside slot |
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| Authors: | Kondo J Kondo A Aoki K Takatsuji S Mitomi O Imaeda M Kozuka Y Minakata M |
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| Affiliation: | NCK Insulators Ltd., Aichi; |
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| Abstract: | A newly designed low-driving-voltage X-cut lithium niobate optical modulator with a two step backside slot is proposed. This modulator was fabricated with micro-machining technology utilising excimer laser ablation. The modulation bandwidth of this modulator achieves 25 GHz and the driving voltage is 2.8 V at 1 kHz |
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