Si-based guided-mode resonance filter on a micro-optical bench |
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Authors: | Wang CM Chang JY Hsu CL Lee CC Yang JC |
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Affiliation: | Inst. of Opt. Sci., Nat. Central Univ., Jung-Li, Taiwan; |
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Abstract: | An out-of-plane guided-mode resonance filter on a single Si chip using a two-layer polysilicon surface micromachining process has been proposed. To the best of the authors' knowledge, this is the first time that a monolithic optical filter has been integrated on a silicon micro-optical bench. This device can be used as a bi-directional transceiver filter. The extinction ratio between 1550 and 1310 nm could be as low as 40 dB and the channel passband at 1550 nm was 20 nm. |
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