| 功率器件漏电流的PEM定位和分析 |
| |
| 引用本文： | 吴顶和,方强,邵雪峰,俞宏坤.功率器件漏电流的PEM定位和分析[J].固体电子学研究与进展,2008,28(2):308-313. |
| |
| 作者姓名： | 吴顶和 方强 邵雪峰 俞宏坤 |
| |
| 作者单位： | 1. 复旦大学材料科学系,上海,200433
2. 快捷半导体(苏州)有限公司,江苏,苏州,215021 |
| |
| 摘 要： | 光发射显微镜(PEM)系统是应用于微电子器件漏电流定位和分析的有效工具。利用PEM系统的激光光束诱导阻抗变化(OBIRCH)功能和光发射(EMMI)功能,从正面可直接对功率器件大的漏电流进行定位观察。利用PEM的EMMI功能,还可从背面对器件微弱的漏电流进行定位和分析。介绍了PEM系统对功率器件芯片不同量级的漏电流进行定位与分析的应用,为分析功率器件漏电流失效提供依据。
|
| 关 键 词： | 光发射显微镜 功率器件 漏电流定位 失效分析 |
Leakage Localization and Analysis of Power Device by PEM |
| |
| WU Dinghe,FANG Qiang,SHAO Xuefeng,YU Hongkun.Leakage Localization and Analysis of Power Device by PEM[J].Research & Progress of Solid State Electronics,2008,28(2):308-313. |
| |
| Authors: | WU Dinghe FANG Qiang SHAO Xuefeng YU Hongkun |
| |
| Affiliation: | WU Dinghe1 FANG Qiang1 SHAO Xuefeng2 YU Hongkun1(1Dept.Materials Science,Fudan University,Shanghai,200433,CHN)(2Fairchild Semiconductor(Suzhou) Co.,Suzhou,Jiangsu,215021,CHN) |
| |
| Abstract: | PEM system is an effective tool widely used in leakage localization and analysis of microelectronic device.OBIRCH(Optical beam Induced resistance change) function and EMMI(Emission microscope) function of PEM are applied to locate and observe the strong leakage of power device from the front-side.EMMI function also can be applied to locate and analyse the weak leakage of power device from the backside.Application of PEM system in localization and analysis of leakage of different levels of power device also ... |
| |
| Keywords: | PEM power device leakage localization failure analysis |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
|
