| 划片机工作台直线度的设计与实现 |
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| 引用本文： | 王明权,李战伟.划片机工作台直线度的设计与实现[J].电子工业专用设备,2007,36(12):35-39. |
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| 作者姓名： | 王明权 李战伟 |
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| 作者单位： | 中国电子科技集团公司第四十五研究所,北京东燕郊,101601 |
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| 摘 要： | 依据IC晶圆的切割道和先进封装的工艺数据,分析划片机的误差,分配各功能部件的精度。依据桥形结构划片机的结构,建立工作台的力学模型,确定直线导轨的类型,研究直线导轨副工作台直线度的实现方法。
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| 关 键 词： | 误差分析 精度分配 直线度 均化效应 |
| 文章编号： | 1004-4507（2007）12-0035-05 |
| 收稿时间： | 2007-11-30 |
| 修稿时间： | 2007年11月30 |
Design and Implementation of Linearity of Dicing Saw's Table |
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| WANG Ming-quan,LI Zhan-wei.Design and Implementation of Linearity of Dicing Saw''''s Table[J].Equipment for Electronic Products Marufacturing,2007,36(12):35-39. |
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| Authors: | WANG Ming-quan LI Zhan-wei |
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| Abstract: | According to IC wafer’s street and process datum of advanced package, this article analyzed the error of Dicing saw and the accuracy distribution of functional parts. Based on the bridge-type frame structure of Dicing saw, mechanical model of table was established, linear motion rolling guide's type was chosen, the implementation method of linearity of table was researched. |
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| Keywords: | Error analysis Accuracy distribution Linearity Averaging effect |
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