| 蠕动泵原理及在化学机械抛光过程中的应用 |
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| 引用本文： | 高慧莹,刘涛,孙振杰.蠕动泵原理及在化学机械抛光过程中的应用[J].电子工业专用设备,2010,39(9):48-51. |
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| 作者姓名： | 高慧莹 刘涛 孙振杰 |
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| 作者单位： | 中国电子科技集团公司第四十五研究所,北京,101601 |
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| 摘 要： | 主要分析了蠕动泵的组成和工作原理,描述了蠕动泵在化学机械抛光过程中的应用特点和优势。详细介绍了蠕动泵在应用过程中的控制方法和选用注意事项。
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| 关 键 词： | 蠕动泵 化学机械抛光 控制 泵头 泵管 |
The Peristaltic Pump's Work Theory and its Application in the Chemical Mechanical Polishing Process |
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| GAO Huiying,LIU Tao,SUN Zhenjie.The Peristaltic Pump''s Work Theory and its Application in the Chemical Mechanical Polishing Process[J].Equipment for Electronic Products Marufacturing,2010,39(9):48-51. |
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| Authors: | GAO Huiying LIU Tao SUN Zhenjie |
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| Affiliation: | GAO Huiying,LIU Tao,SUN Zhenjie(The 45th Research Institute of CETC,Beijing 101601,China) |
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| Abstract: | This article analyses the Peristaltic Pump's configuration and working principle,introduced its applying characteristic and advantage in the chemical mechanical polishing process.In addition,this article expounds the controlling and choosing ways and means when applying the Peristaltic Pump. |
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| Keywords: | Peristaltic Pump Chemistry Machine Polishing Control Pump Head Pump Tubing |
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