Affiliation: | 1. Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education & International Center for Dielectric Research, School of Electronic Science and Engineering & The International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technology, Xi'an Jiaotong University, Xi'an, 710049 China;2. State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai, 200050 China;3. Key Laboratory of Microelectronics Device and Integrated Technology, The Institute of Microelectronics of Chinese Academy of Sciences, Beijing, 100029 China
University of Chinese Academy of Sciences, Beijing, 100049 China;4. The State Key Laboratory for Manufacturing Systems Engineering & The International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technology, Xi'an Jiaotong University, Xi'an, 710049 China;5. Leibniz-Institut für Kristallzüchtung, Max-Born-Straße 2, 12489 Berlin, Germany;6. Key Laboratory of Physical Electronics and Devices, Ministry of Education, School of Electronic Science and Engineering, Xi'an Jiaotong University, Xi'an, 710049 China;7. Department of Chemistry and 4D LABS, Simon Fraser University, Burnaby, British Columbia, V5A 1S6 Canada |