响应曲面法在VDMOS设计中的应用

响应曲面法(Response Surface Methodology)是数学方法和统计方法相结合的产物,是用来对所感兴趣的问题进行建模和分析的一种方法。其利用合理的实验设计方法并通过实验得到一定数据,采用复合中心来拟合因素与响应值之间的预测模型,通过对模型的分析来寻求最优设计参数和流程的最佳操作设置,从而解决多变量的实验问题。该方法可应用在VDMOS功率器件设计中,可以使VDMOS设计人员更加直观地从多个复杂的设计参数匹配中寻找到最有价值的匹配,大大方便了VDMOS设计人员。同时,该方法也可以大大降低器件设计及生产过程中的时间和成本。

The Applications of Response Surface Methodology in VDMOS Design

Response surface methodology is based on the mathematical methods and statistical methods, and which using reasonable experimental design methods and getting some data from experiments, using a composite center to fit the forecasting model between the factors and response, based on the analysis of the model to find the best optimal design parameters and operating process settings, to solve the experiments which have the multivariate problem. This method can be applied in the design of VDMOS power device, the designer can intuitive find the most valuable match from a number of complex design parameters, it is very convenient for VDMOS designer. And at the same time, this method can greatly reduce the cost and process time of the device.