多次压氦法和预充氦压氦法质谱细检漏方法研究

密封电子元器件在长时间存放后,会存在无法检测的现象.当超过密封件细漏检测的最长候检时间时,应再次压氦,然后进行细检漏.按现行的各种规范的规定,压氦法和预充氦法再压氦的条件、程序和判据一般均与首次压氦相同,但分析表明,这样可能会使测量漏率判据出现成倍或更大的偏差,有时会出现大漏的漏检和细漏的错判.推演出多次压氦法和预充氦压氦法的测量漏率判据公式,给出了相应的压氦条件和细检漏的最长候检时间,从而更为便捷准确地解决了长候检时间下的密封性检测问题.

Helium Mass Spectrometric Fine Leak Detection Methods Research for Multi-Pressing Helium Method and Pressing Helium after Prefilling Helium Method

According to the specifications or contract, a sealed electronic component may require repeat- ed helium mass spectrometric fine-leak tests in production, delivery and acceptance process. The first de- tection can use pressing helium method or prefilling helium method, but after long storage, especially over the longest dwell time, the leak rate may not get through detection unless pressing helium again be- fore fine-leak detection. Under the existing provisions of various norms, the conditions, procedures and criteria of the pressing helium are generally the same as with the first pressure helium for pressing helium method and prefilling method. But the analysis shows that this may cause the leak-rate criterion lager or multiplied deviations, sometimes there will be a misunderstood sest of large leak or an misapplied judg- ment of fine leak. The formula of measured leak rate criterion for the multi-pressing helium method and pressing helium after prefilling helium method are deduced. Through research, the condition and the lon- gest dwell time are given, which is more convenient and accurate solution to the long dwell time of seal- ability detection.