| 准分子激光溅射法制备高温超导薄膜机理研究的新进展 |
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| 引用本文： | 范永昌,安承武,李再光,陆冬生.准分子激光溅射法制备高温超导薄膜机理研究的新进展[J].激光与红外,1991(4). |
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| 作者姓名： | 范永昌 安承武 李再光 陆冬生 |
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| 作者单位： | 华中理工大学激光技术国家实验室
(范永昌，安承武，李再光)，华中理工大学激光技术国家实验室(陆冬生) |
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| 摘 要： | 本文简要介绍准分子激光溅射法制备高温超导薄膜的实验技术。重点阐述了近年来由大量实验研究所揭示出的激光溅射及成膜过程的一些基本特点和规律。同时,对准分子激光制膜保成份蒸镀这一独特优点的机制进行了深入的讨论。
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| 关 键 词： | 激光溅射 高温超导薄膜 |
The New Progress in Mechanism Studies for Preparing High Temperature (TC) Superconducting Film by Excimer Laser Sputtering Method |
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| Fan Yongchang An Chengwu Li Zaiguang Lu Dongsheng.The New Progress in Mechanism Studies for Preparing High Temperature (TC) Superconducting Film by Excimer Laser Sputtering Method[J].Laser & Infrared,1991(4). |
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| Authors: | Fan Yongchang An Chengwu Li Zaiguang Lu Dongsheng |
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| Abstract: | In this paper, the laser sputtering method for preparing high TC superconducting films introduced. Some basic law and characteristics of laser sputtering and film growth process, revealed by a lot of experiment studies are described in detail. The mechanisms for preservation of the correct stoichiometry in the film is also discussed. |
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| Keywords: | laser sputtering high temperature superconducting film |
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