非垂直入射HS传感器测量数据的修正

采用变形镜模拟激光镜面热畸变,使变形镜在不同的驱动电压下产生相应的形变,用Hartmann-Shack传感器作为测量仪器,分别以垂直入射法和非垂直入射法测量了变形镜在各驱动电压下的形变数据。对比两种方法测得的波前像差峰谷值(PV值)数据发现,非垂直入射法测得的数据小于垂直入射法测得的真实数据,两者之间的相对偏差随形变量的增大而增大,且与入射角密切有关,随着入射角的增大,相对偏差明显增大。若将非垂直入射法测得的数据除以入射角的余弦对数据进行修正,结果与真实数据吻合很好,波前像差PV值最大相对偏差不到2%。

Correction of Hartmann-Shack sensor measuring data based on non-normal incidence method

In this paper,a deformable mirror is used to simulate mirror thermal distortion induced by laser,which deforms by different drive voltages applied to it.The deformation is measured by a Hartmann-Shack sensor by the method of normal incidence and non-normal incidence respectively.In contrast to the true peak to valley value(PV value)of wavefront aberration which is measured by normal incidence method,the PV value of wavefront aberration measured in non-normal incidence method is less.The relative deviation between them increases with the increasing of the deformation,and closely relates with the incident angle.With the increasing of the incident angle,the relative deviation increases significantly.In order to correct the deviation,the PV data which is measured by non-normal incidence method divided by the cosine of the incident angle are analyzed.It is found to match the true PV value well.The maximum relative deviation between them is less than 2%.